硅酸盐学报

高反射率Ag-Cu纳米膜玻璃的制备与表征

作者：徐勇军杨晓西李永梅

单位：东莞理工学院化学生物工程系东莞理工学院化学生物工程系东莞理工学院化学生物工程系广东东莞523808 广东东莞523808 广东东莞523808

关键词：玻璃磁控溅射高反射率银-铜纳米膜

分类号：TQ171.7

出版年,卷(期):页码：2008,36(2):253-256

DOI：

摘要：

采用磁控溅射法在玻璃基片上制备纳米Ag薄膜,并在其上镀一层Cu膜作为附着层,利用U-4100分光光度计测量纳米膜玻璃对可见光(380～780nm)和太阳光(340～1800nm)的反射率;用Auger电子能谱仪测量膜的成分;聚焦离子束和超级扫描电子显微镜测量双层膜中单层膜的厚度。结果表明:膜厚小于110 nm的银膜,反射率随膜厚增加而变大,当膜厚大于110 nm时,其反射率趋于一定值,附着层Cu膜对膜玻璃反射率影响不大。另外,在膜厚一定的情况下,随着玻璃厚度的增加,膜玻璃反射率逐渐减小。膜玻璃对可见光的反射率可以达到97.85%,太阳光的反射率可以达到96.74%。采用聚焦离子束和超级扫描电子显微镜相结合的方法测量多层膜中单层膜的厚度,得到了较好的结果。

Nanosize Ag films were deposited on glass substrates by magnetron sputtering method,then nanosize copper films were deposited on them as adherence layer.The reflectivity of Ag films in the range of 380-780 nm(visible light)and 340-1 800 nm (sunlight)was measured using a U-4100 spectrophotometer.The composition was measured using an Auger electron spectrometer and the thickness of a monolayer film in multi-layer films was investigated using a focus ion beam and super scanning electron mi- croscope.The results show that the reflectivity of Ag film obviously increases with the increase of the film thickness when the film thickness is less than 110 nm,but reaches a constant value if the film thickness is greater than 110nm.Cu film has less infuence on the reflectivity of film glass.Reflectivity of visible light of the film glass can reach 97.85% and the reflectivity of sunlight can reach 96.74%.Additionally,when the Ag film thickness was kept constant,the reflectivity decreases with the increase of the thickness of the glass substrates.For the measurement of thickness of a monolayer film in multi-layer films,a good result was obtained by using a focus ion beam and a super scanning electron microscope.

基金项目：

东莞市科技攻关(2004D1027)资助项目。

作者简介：

参考文献：

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