硅酸盐学报

热退火条件对磷锗锌晶体性质的影响

单位：1. 山东大学晶体材料国家重点实验室济南250100 2 .华东微电子技术研究所合肥 230031

分类号：O782

出版年,卷(期):页码：2012,40(6):883-887

DOI：

摘要：

摘要：以高纯度的Zn，Ge和P粉末作为原料，采用垂直Bridgman法生长了磷锗锌(ZnGeP₂，ZGP)晶体；分别在真空、磷蒸汽和ZGP晶体粉末中对生长的ZGP晶体进行了退火。测量了不同的退火条件下ZGP晶体中各元素的含量、激光损伤阈值、透过光谱和Raman光谱。研究表明：在ZGP晶体粉末中退火后的晶体激光损伤阈值为96.43MW/cm²，比在真空、磷蒸汽中退火的高；在近红外区域的吸收有所减少。Raman光谱测量结果表明，晶体的Raman振动模的数量发生了变化，表明退火环境对ZGP晶体的结果有一定影响。在ZGP晶体粉末中退火的ZGP晶体的性能有明显改善

Abstract: A single crystal of ZnGeP₂(ZGP) was grown via a vertical Bridgman technique with high-purity elements like Zn, Ge and P as raw materials. The as-grown ZGP crystals were annealed in different environments (i.e., vacuum, P vapor and ZGP powder). The elemental content, laser damage threshold, transmittance spectra and Raman spectra of the crystals annealed in the different environments were measured. A laser damage threshold value of 96.43 MW/cm² of the ZGP crystal annealed in ZGP powder was obtained, which was greater than that of the ZGP crystal annealed in either vacuum or P vapor. The near-infrared absorption of the ZGP crystal annealed in ZGP powder was reduced, compared to the results of the ZGP crystal annealed in either vacuum or P vapor. The Raman spectra showed that the number of Raman modes varied with the annealing environment, reflecting that the annealing treatment had an effect on the crystal structure. Some characteristics of the ZGP crystal annealed in ZGP powder could be better than those of the ZGP crystal annealed in either vacuum or P vapor.

基金项目：

作者简介：

杨永娟(1980—)，女，博士研究生。第一作者：顾庆天(1973—)，男，博士，副教授

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